Steady-state thermal conductivity measurements of AlN and SiC substrate materials - Components, Hybrids, and Manufacturing Technology, IEEE Transactions on

نویسنده

  • ELIZABETH S. DETTMER
چکیده

Abstmct-Measurements of thermal conductivity on conventional and newly developed electronic ceramics are presented as part of an effort to incorporate the new high thermal conductivity ceramics into microcircuit manufacturing. Motivated by large variations in values claimed by different vendors for ostensibly similar materials, a longitudinal bar apparatus was built to measure thermal conductivities of actual s u b strate materials on both an individual and a lot sampling basis. The longitudinal bar method is compared to other experimental techniques for measuring thermal conductivity.

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تاریخ انتشار 2004